Stirring apparatus for combinatorial processing
AssigneeIntermolecular, Inc.
InventorRajesh Kelekar
Life of this patent
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Abstract
An apparatus and system for stirring liquid inside a flow cell. In one implementation, the apparatus includes a rotatable disc configured to receive liquid at a top side of the disc and distribute the liquid substantially evenly around a periphery of the flow cell. The disc has a triangular cross sectional area. The apparatus may further include a set of fins attached to a bottom side of the disc, wherein the set of fins is configured to draw the liquid from the periphery of the flow cell into the center of the flow cell.
Claims15
An apparatus for distributing liquid inside a flow cell, comprising:
- a rotatable disc having a slope portion configured to receive liquid at a top side of the disc and distribute the liquid around a periphery of the flow cell;
- and
- a set of fins attached to a bottom side of the disc, wherein the set of fins protrudes from a bottom side of the disc toward a substrate, wherein the set of fins is disposed at an offset from the diameter of the disc, and wherein the set of fins has a flat bottom surface substantially parallel with the substrate.
A combinatorial semiconductor processing system, comprising:
- a plurality of flow cells, wherein each flow cell comprises:
- a chamber;
- a liquid dispenser for introducing liquid into the chamber;
- and
- a stirring apparatus for agitating the liquid, wherein the stiffing apparatus comprises a rotatable disc having a slope portion for receiving the liquid and distributing the liquid around a periphery of the flow cell and a set of fins disposed below the disc, wherein the set of fins protrudes from a bottom side of the disc toward a substrate, wherein the set of fins is disposed at an offset from the diameter of the disc, and wherein the set of fins has a flat bottom surface substantially parallel with the substrate.
A method for performing a combinatorial process on a substrate, comprising:
- defining multiple regions on the substrate;
- processing the multiple regions in a combinatorial manner;
- introducing liquid to one of the multiple regions;
- distributing the liquid around a periphery of the one of the multiple regions using a rotatable disc;
- and
- drawing the liquid into the center of the one of the multiple regions using a set of fins attached to a bottom side of the disc, wherein the fins comprise a flat bottom surface substantially parallel with the substrate,
- wherein the set of fins comprises a plurality of fins disposed at an offset from the diameter of the disc.
Dependencies are inferred from the claim text.