Method of producing a movable lens structure for a light shaping unit
AssigneeImego AB
InventorsGert Andersson, Stefan Bengtsson, Sverker Hård, Anders Larsson, Fredrik Nikolajeff, Henrik Rödjegård
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Abstract
The invention relates to a method of producing a movable lens structure that comprises the steps of: forming a lens from a lens material disposed on a carrier of another material (step 58), and forming a micromechanical structure from the carrier (step 60), wherein the forming of the lens takes place before the forming of the micromechanical structure. With this method a simplified production method is obtained that simplifies difficult compatibility requirements between micromechanics and lens that can otherwise be hard to meet.
Claims13
A method of producing a compact movable structure for a light shaping unit comprising the steps of:
- forming a light shaping unit through embossing from a layer of polymer material provided on a carrier of another material;
- and
- subsequently forming, from said carrier, an intermediate micromechanical plate for movably supporting the light shaping unit in a micromechanical structure,
- subsequently forming a cavity through the micromechanical structure up to the light shaping unit by etching, and
- wherein the light shaping unit serves as an etch stop in the forming of the cavity.
Dependencies are inferred from the claim text.