Method and system for adjusting beam dimension for high-gradient location specific processing

A method for location specific processing of asperities on a substrate, comprising:

• establishing a gas cluster ion beam (GCIB) according to a set of beam properties;
• acquiring metrology data for said substrate;
• determining multiple different asperities each having a different spatial gradient and a different location on said substrate, based on said metrology data;
• computing correction data for processing each of said multiple different asperities on said substrate using said metrology data and said set of beam properties;
• adjusting at least one beam property in said set of beam properties for said GCIB to establish an adjusted GCIB having predetermined characteristics for treating one of said multiple different asperities having a determined spatial gradient and location
• applying said adjusted GCIB to said one of said multiple different asperities at its location on the substrate, according to said correction data;
• and
• repeating said adjusting and applying steps for each other of said multiple different asperities having a respective different spatial gradient and a respective different location on the substrate, wherein said predetermined characteristics include a beam edge profile having a maximum slope equivalent to or exceeding a maximum gradient of a respective asperity.