Enclosure for controlling the environment of optical crystals
AssigneeKLA-Tencor Technologies Corporation
InventorJ. Joseph Armstrong
Life of this patent
Estimating the term…
Abstract
An enclosure that maintains the environment of one or more optical crystals and allows efficient frequency conversion for light at wavelengths at or below 400 nm with minimal stress being placed on the crystals in the presence of varying temperatures. Efficient conversion may include multiple crystals of the same or different materials. Multiple frequency conversion steps may also be employed within a single enclosure. Materials that have been processed specifically to provide increased lifetimes, stability, and damage thresholds over designs previously available are employed. The enclosure allows pre-exposure processing of the crystal(s) such as baking at high temperatures and allowing real time measurement of crystal properties.
Claims31
An environmentally controlled enclosure comprising a crystal, comprising:
- securing hardware configured to secure the crystal within the enclosure comprising a spring element and a multiple orthogonal surface cap configured to receive the spring element;
- a window configured to permit light to enter the enclosure and contact the crystal;
- and
- a seal formed between the window and the enclosure;
- wherein the enclosure comprises a diagonal inner surface and two orthogonal inner surfaces opposite the diagonal inner surface, and further wherein when the spring element contacts the diagonal inner surface, the multiple orthogonal surface cap maintains the crystal against the two opposite orthogonal inner surfaces.
An environmentally controlled enclosure configured to house a crystal, comprising:
- a diagonal inner surface and two orthogonal inner surfaces opposite the diagonal inner surface;
- means for securing the crystal within the enclosure comprising a spring element and a multiple orthogonal surface cap configured to receive the spring element;
- and
- a window configured to permit light to enter the enclosure and contact the crystal;
- wherein the spring element is configured to contact the diagonal inner surface and maintain the multiple orthogonal surface cap against the crystal and position the crystal against the two opposite orthogonal inner surfaces.
An enclosure configured to control an environment comprising a plurality of crystals, comprising:
- at least one diagonal inner surface and at least two orthogonal inner surfaces opposite each diagonal inner surface;
- hardware configured to secure the plurality of crystals within the enclosure comprising at least one spring element and a multiple orthogonal surface cap configured to receive the at least one spring element;
- and
- at least one window configured to enable light to enter and exit the enclosure;
- wherein each spring element is configured to contact one diagonal inner surface and maintain the multiple orthogonal surface cap against one crystal and position the one crystal against at least two opposite orthogonal inner surfaces.
An enclosure configured to control an environment comprising a plurality of crystals, comprising:
- a metal frame comprising a diagonal inner surface and two orthogonal inner surfaces opposite the diagonal inner surface;
- and
- a removable crystal holder comprising at least one spring element and at least one multiple orthogonal surface cap configured to receive one spring element;
- wherein one spring element is configured to contact the diagonal inner surface and maintain one multiple orthogonal surface cap against one crystal and position the one crystal against the two opposite orthogonal inner surfaces.
Dependencies are inferred from the claim text.