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US 8,298,034 B2Granted
Patterning a thick film paste in surface features
AssigneeE. I. Du Pont de Nemours and Company
InventorLap-Tak Andrew Cheng
Life of this patent
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Abstract
This invention relates to a method for the fabrication of electrical and electronic devices using a photoresist deposited in pre-existing through holes in a device structure and a thick film paste, and to the devices made by such method. The method allows thick film paste deposits in the corners of the holes. This invention also relates to devices made with thick film pastes that are patterned using a diffusion layer made from residual photoresist deposits in a hole.
Claims10
A method of depositing a thick-film paste in a through hole having a side wall, comprising
- (a) providing a stack of layers that comprises a base layer and an external layer disposed on the surface of the base layer, or on the surface of one or more intermediate layers that reside between the external layer and the base layer, wherein the stack of layers has a top and the external layer is on the top of the stack of layers and comprises a plurality of through holes that pass through the external layer and any intermediate layers to expose the surface of the base layer;
- (b) providing a photoresist material;
- (c) coating with the photoresist material to thereby provide a layer of the photoresist material across the surface of the external layer and a layer of the photoresist material in each through hole and onto the surface of the base layer, wherein the thickness of the layer of the photoresist material coated in each through hole and onto the surface of the base layer is greater than the thickness of the layer of the photoresist material deposited on the surface of the external layer;
- (d) solidifying the photoresist material, with the result that the thickness of the layer of the solidified photoresist material coated in the through holes is greater than the thickness of the layer of the solidified photoresist material on the surface of the external layer;
- (e) flood irradiating, from the top of the stack of layers, the photoresist material to convert to a soluble form (i) the solidified photoresist material on the external layer, and (ii) the solidified photoresist material down to a selected depth of the solidified photoresist material in the through holes;
- (f) developing the photoresist material and removing the solidified photoresist material (1) from the external layer, and (2) from within the through holes down to the selected depth, wherein removal of photoresist material from within the through holes removes photoresist material from an interior portion of a circumscribed area of the surface of the base layer thereby exposing the surface of the base layer and leaving photoresist material remaining at the junction of the side wall of each through hole with the surface of the base layer;
- (g) providing a thick-film paste comprising a solvent;
- (h) coating with the thick-film paste to provide thereby a layer of the thick-film paste across the external layer and in the through holes, wherein the thick-film paste has contacted the photoresist material at the junction of the side wall of each through hole and the surface of the base layer;
- (i) solubilizing the photoresist material with the solvent in the locations in the through holes at which the thick-film paste contacts the photoresist material;
- and
- (j) developing the thick-film paste to remove it from all locations except those in which the thick-film paste has contacted the photoresist material.
8 more elements
Dependencies are inferred from the claim text.