Storage container for liquid chlorosilane and closing lid therefor
AssigneeMitsubishi Materials Corporation
InventorsGo Sasaki, Takanori Ito
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AssigneeMitsubishi Materials Corporation
InventorsGo Sasaki, Takanori Ito
Estimating the term…
The storage container for a liquid chlorosilane of the present invention comprises, a tank which stores the liquid chlorosilane, a valve which is connected to the tank and to which an external pipe can be connected detachably, and a closing lid which seals the valve when the external pipe is detached from the valve. The valve comprises a housing and a valve body provided in the housing. The closing lid has a lid body having a sealing surface contacting the connecting surface of the connecting flange, a supply pipe which supplies an inert gas to a space between the closing lid and the valve body in the housing, a supply valve which opens or closes the supply pipe, a discharge pipe which discharges a gas in the space, and a discharge valve which opens or closes the discharge pipe.
A storage container for a liquid chlorosilane, comprising:
A closing lid for a liquid chlorosilane storage container connected detachably to a connecting flange of a valve fixed to a tank which stores the liquid chlorosilane, comprising:
Dependencies are inferred from the claim text.