Substrate support unit, and substrate treating apparatus and method using the same
AssigneeSemes Co., Ltd.
InventorsDong-Soon Hwang, Tae-In Kim, Sung-Jin Hong
Life of this patent
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Abstract
Provided are a substrate support unit and a substrate treating apparatus and method using the same. The substrate support unit includes a first support part and a second support part. The first support part is movable in a first direction. The first support part supports a first portion of a substrate in which a processing fluid is supplied in a direction corresponding to the first direction. The second support part is movable in a second direction. The second support part supports a second portion of the substrate. At least one of the first support part and the second support part supports the substrate while the processing fluid is supplied.
Claims10
A substrate support unit, comprising:
- a first support part movable in a vertical direction, the first support part supporting lower ends of a plurality of substrates that are vertically disposed;
- and
- second support parts movable in a horizontal direction via movable shafts, the second support parts supporting opposing sides of the plurality of substrates in at least three positions, a first position located proximate a center edge of the opposing sides, a second position located above the center edge of the opposing sides, and a third position located below the center edge of the opposing sides;
- wherein the second support parts and the plurality of substrates are rotatable together about the movable shafts.
A substrate treating apparatus, comprising:
- a first chamber receiving a substrate, the first chamber performing a process with respect to the substrate;
- a sprayer in the first chamber, the sprayer supplying a processing fluid to the substrate;
- and a substrate support unit in the first chamber, the substrate support unit supporting the substrate while the process is progressed,
- wherein the substrate support unit comprises:
- a first support part for supporting a lower end of the substrate that is vertically disposed, and the first support part being movable in a vertical direction;
- and
- a second support for supporting opposing sides of the substrate in at least three positions, a first position located proximate a center edge of the opposing sides, a second position located above the center edge of the opposing sides, and a third position located below the center edge of the opposing sides, the second support part being movable in a horizontal direction, and the second support part comprising a shaft for moving the second support part in the horizontal direction;
- wherein at least one of the first support part and the second support part supports the substrate while the processing fluid is supplied;
- and
- wherein a portion of the second support part and the substrate are rotatable together about the shaft.
Dependencies are inferred from the claim text.