Deposition box for silicon-based thin film solar cell
AssigneeShenzhen Trony Science & Technology Development Co., Ltd.
InventorYi Li
Life of this patent
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Abstract
A movable deposition box (02) for silicon-based thin film solar cell comprises an electrode array composed of at least a group of cathode plates (203) and a piece of anode plate (208) which are set in movable chamber, wherein a feeding socket (203-1) is positioned on a circular or semicircular concave surface in the center area on the backside of the cathode plates (203), a circular or semicircular end face (201-1) of a feeding component (201) which has a flat middle part contacts the signal feeding socket (203-1) and feeds in RF/VHF power signal, the anode plate (208) is grounded, and a shield cover (204) of the cathode plate has through-hole (204-1) and is insulated from the cathode plate (203).
Claims11
A deposition box for silicon-based thin film solar cells, comprising:
- an electrode plate component;
- a signal feed-in component;
- and
- a chamber, wherein:
- electrode plate component includes a cathode plate and a shielding cover of the cathode plate, the shielding cover includes a ceramic insulating layer and a shielding layer, the chamber is a movable chamber with rollers and contains installed the electrode array composing of the electrode plate;
- a feed-in port is located in a sunken circular or semicircular area at the center of the backside of the cathode plate of the electrode plate component;
- the signal feed-in component connecting with the feed-in port by surface contact connects with the negative electrode of the feeding Very High Frequency (VHF) power supply signals;
- one end surface of the signal feed-in component is circular or semicircular;
- the shielding cover of the cathode plate corresponding to the feed-in port has a through hole;
- the cathode plate is insulated from the shielding cover;
- the electrode array has at least one set cathode plates and one anode plate;
- and
- the cathode plate is single-surface discharging, and the shielding cover covers entire back and side surfaces of the cathode plate.
A signal feed-in method of the deposition box for silicon-based thin film solar cells, comprising:
- an electrode plate component, a feed-in component, and a movable chamber with rollers for a signal feeding mode, wherein:
- the electrode array is installed in the movable chamber with rollers;
- the electrode array has at least one set cathode plates and one anode plate;
- the feed-in port is located in a sunken circular or semicircular area at the center of the backside of the cathode plate of the electrode plate component, and the feed-in component is surface connected with the cathode plate;
- the electrode plate signal is fed in through surface contact mode;
- one end of the signal feed-in component is of a circular or semicircular shape and makes surface contact with a feed-in port which is circular or semicircular shape of the cathode plate to feed-in VHF power supply signals;
- the cathode shielding cover and anode plate are grounded, the shielding cover of the cathode plate includes a ceramic insulating layer and shielding layer;
- the cathode plate is single-surface discharging, and the shielding cover covers entire back and side surface of the cathode plate, and the shielding cover of the cathode plate corresponding to the feed-in port has a through hole.
Dependencies are inferred from the claim text.