Pressure sensor with low cost packaging
AssigneeHoneywell International Inc.
InventorsRichard Wade, Ian Bentley
Life of this patent
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Abstract
A pressure sensor is disclosed that may include a minimum amount of fluid coupling packaging. In one illustrative embodiment, a pressure sensor assembly may include a pressure sensor die having a front side and a back side, and a pressure sensing diaphragm. The pressure sensor assembly may further include a housing having a mounting side and a sensing side. The sensing side may define a pressure port. The pressure sensor die may be secured to the housing such that the pressure sensing diaphragm is exposed to the pressure port, and such that front side of the pressure sense die is accessible from outside of the housing.
Claims19
A pressure sensor assembly suitable for mounting to a printed circuit board, comprising:
- a pressure sensor die including:
- a front side;
- a back side;
- a pressure sensing diaphragm;
- one or more piezoresistors coupled to the pressure sensing diaphragm for sensing a pressure induced stress in the pressure sensing diaphragm;
- two or more electrical bond pads positioned on the front side of the pressure sensor die, with each of the two or more electrical bond pads electrically coupled to one or more of the piezoresistors;
- a housing having a mounting side and a sensing side, with the sensing side defining a pressure port;
- and
- the pressure sensor die secured to the housing, with the back side of the pressure sensor die facing the sensing side of the housing with the pressure sensing diaphragm exposed to the pressure port, and with the front side of the pressure sensor die positioned adjacent to the mounting side of the housing with the two or more electrical bond pads of the pressure sensor die being accessible from outside of the housing such that the two or more electrical bond pads are exposed and suitable for soldering directly to two or more corresponding bond pads of the printed circuit board.
A pressure sensor assembly, comprising:
- a pressure port housing including a pressure sensing side and a mounting side, wherein the pressure sensing side includes a sensing side wall that defines a pressure port;
- the pressure port housing further including a pressure sensing die cavity;
- a pressure sensing die having a first side and an opposite second side, the pressure sensing die situated in the pressure sensing die cavity with a first side secured to the sensing side wall of the pressure port housing, the pressure sensing die having a pressure sensing diaphragm that is fluid communication with the pressure port;
- and
- the second side of the pressure sensing die facing away from the sensing side of the pressure port housing and toward the mounting side with the two or more electrical bond pads of the pressure sensor die accessible from outside of the housing such that the two or more electrical bond pads can be electrically and physically connected to two or more corresponding bond pads on another substrate.
A pressure sensor assembly, comprising:
- a pressure sensor die including:
- a front side;
- a back side;
- a pressure sensing diaphragm;
- one or more piezoresistors coupled to the pressure sensing diaphragm for sensing a pressure induced stress in the pressure sensing diaphragm;
- two or more electrical bond pads positioned on the front side of the pressure sensor die, with each of the two or more electrical bond pads electrically coupled to one or more of the piezoresistors;
- a housing having a mounting side, a sensing side, and lateral side walls extending from the sensing side to the mounting side, the sensing side and the lateral side walls defining a pressure sensing die cavity;
- a pressure port defined in the sensing side of the housing;
- the pressure sensor die secured within the pressure sensing die cavity of the housing to the sensing side of the housing via an adhesive;
- wherein the back side of the pressure sensor die faces the sensing side of the housing with the pressure sensing diaphragm exposed to the pressure port and the front side of the pressure sensor die is positioned adjacent to the mounting side of the housing with the two or more electrical bond pads of the pressure sensor die being accessible from outside of the housing.
Dependencies are inferred from the claim text.