Micro-machined accelerometer
AssigneeThales
InventorsRégis Quer, Olivier Lefort, André Boura
Life of this patent
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AssigneeThales
InventorsRégis Quer, Olivier Lefort, André Boura
Estimating the term…
A micromachined accelerometer in a flat plate includes a base and at least two resonator measuring cells provided with a common mobile seismic element, the two measuring cells being placed one on each side of the common mobile seismic element along the sensitive axis of the accelerometer, such that under the effect of an acceleration, the resonator of one measuring cell undergoes a traction while the resonator of the other measuring cell undergoes a compression, the measuring cells respectively configured to amplify the acceleration force generating the translation of the common mobile seismic element provided with a respective anchoring foot-piece. The common mobile seismic element includes at least two mobile seismic masses able to be displaced in translation along the sensitive axis of the accelerometer and/or in rotation with respect to a respective axis of rotation substantially orthogonal to the sensitive axis under the effect of an acceleration along the sensitive axis.
A micromachined accelerometer in a flat plate comprising a base and at least two resonator measuring cells provided with a common mobile seismic element, the two measuring cells being placed one on each side of the common mobile seismic element along the sensitive axis of the accelerometer, such that under the effect of an acceleration, the resonator of one measuring cell undergoes a traction whilst the resonator of the other measuring cell undergoes a compression, said measuring cells respectively comprising means of amplification of the acceleration force generating the translation of the common mobile seismic element provided with a respective anchoring foot-piece, wherein said common mobile seismic element comprises at least two mobile seismic masses able to be displaced in translation along said sensitive axis and/or in rotation with respect to a respective axis of rotation substantially orthogonal to said sensitive axis under the effect of an acceleration along said sensitive axis, connected to each other by a mechanical connecting member able to prevent, at least partly, deformations of the amplification means resulting from deformations of the accelerometer generated by external thermal stresses.
A method of thermo-mechanical decoupling of a mobile seismic element common to two resonator measuring cells of a micromachined accelerometer in a flat plate comprising a base, said measuring cells respectively comprising means of amplification of the acceleration force generating the translation of the common mobile seismic element, comprising mechanically connecting two mobile seismic masses of the common mobile seismic element in such a way as to prevent, at least partly, deformations of the amplification means resulting from deformations of the accelerometer generated by external thermal stresses.
Dependencies are inferred from the claim text.