Method for making surveillance devices with multiple capacitors

A method for making a surveillance and/or identification device, comprising:

• a) forming an electrically conducting strap and a lower capacitor electrode on a substrate;
• b) forming a first dielectric film on the substrate and on a portion of the strap, the first dielectric film exposing a portion of the strap and having an opening over a portion of the lower capacitor electrode;
• c) forming a capacitor dielectric film in the opening, the capacitor dielectric film having a significantly smaller thickness than the first dielectric film;
• d) forming an upper capacitor electrode on the first dielectric film and the capacitor dielectric film, such that the upper capacitor electrode (i) is capacitively coupled to the lower capacitor electrode and (ii) forms a first capacitor and a second capacitor connected in parallel, wherein the first capacitor includes the relatively thin capacitor dielectric film and the second capacitor includes the relatively thick dielectric film and the second capacitor has a greater capacitance than the first capacitor;
• and
• e) forming an antenna and/or inductor on the upper capacitor electrode and the strap, or attaching an antenna and/or inductor to the upper capacitor electrode and the strap.