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US 8,292,698 B1Granted
On-line chamber cleaning using dry ice blasting
AssigneeLam Research Corporation
InventorsHong Shih, Oana M. Leonte, John E. Daugherty, Tuochuan Huang, Gregory J. Goldspring, Michael C. May
Life of this patent
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Abstract
An on-line method of cleaning contaminants from at least one interior surface in plasma chambers comprises blasting one or more interior surfaces of a plasma chamber with dry ice to remove contaminants from the one or more surfaces.
Claims20
An on-line method of cleaning contaminants from at least one interior chamber surface in plasma chambers, the method comprising:
- opening a plasma chamber at an on-line site;
- and
- blasting one or more interior surfaces of the plasma chamber with dry ice, wherein:
- the blasting removes contaminants from the one or more surfaces;
- and
- the cleaning is carried out at the on-line site in which the plasma chamber is regularly operated.
3 more elements
Dependencies are inferred from the claim text.