Moving a free-standing structure between high and low adhesion states
AssigneeCavendish Kinetics, Inc.
InventorsCharles Gordon Smith, Richard L. Knipe
Life of this patent
Estimating the term…
Abstract
Embodiments disclosed herein generally solve a stiction problem in switching devices by using a series of pulses of force which take the switch from being strongly adhered to a landing electrode to the point where it is only weakly adhered. Once in the low adhesion state, the switch can then be pulled away from contact with a lower force provided by either the spring constant of the switch and/or the electrostatic forces resulting from low voltages applied to nearby electrodes.
Claims20
A method of moving a switch in a micro-electromechanical device, comprising:
- applying one or more pulses of first voltage to a first electrode to move the switch from a first position in contact with a second electrode to a second position different than the first position and in contact with the second electrode while maintaining the switch in contact with the second electrode during the moving, the one or more pulses of first voltage each applied for a first period of time;
- and
- applying a second voltage to a third electrode disposed above the first electrode and the switch to move the switch from the second position to a third position spaced from the second electrode, the second voltage applied for a second period of time that is greater than the first period of time.
A method of operating a MEMS device, comprising:
- applying a first voltage to a first electrode to move a switch from a first position spaced from landing area and a second position in contact with the landing area;
- measuring the resistance through the switch at the second position;
- applying a second voltage to the first electrode to move the switch from the second position to a third position still in contact with the landing area and different than the second position;
- and
- measuring the resistance through the switch at the third position.
A method of operating a MEMS device, comprising:
- applying a first voltage to a first pull-in electrode to bring a rocker plate into contact with a first landing electrode, the MEMS device comprising:
- the rocker plate coupled to a pivot contact;
- the first landing electrode spaced from the pivot contact;
- the first pull-in electrode disposed between the pivot contact and the first landing electrode;
- a second landing electrode spaced from the pivot contact;
- and
- a second pull-in electrode disposed between the pivot contact and the second landing electrode;
- measuring the first resistance through the rocker plate;
- applying one or more pulses of a second voltage to the first pull-in electrode;
- measuring the second resistance through the rocker plate;
- applying one or more pulses of a third voltage to the first pull-in electrode;
- measuring the third resistance through the rocker plate;
- and
- applying a fourth voltage to the second pull-in electrode to move the rocker plate out of contact with the first landing electrode.
Dependencies are inferred from the claim text.