Polarization-modulating optical element
AssigneeCarl Zeiss SMT GmbH
InventorsDamian Fiolka, Markus Deguenther
Life of this patent
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Abstract
A polarization-modulating optical element consisting of an optically active crystal material has a thickness profile where the thickness, as measured in the direction of the optical axis, varies over the area of the optical element. The polarization-modulating optical element has the effect that the plane of oscillation of a first linearly polarized light ray and the plane of oscillation of a second linearly polarized light ray are rotated, respectively, by a first angle of rotation and a second angle of rotation, with the first angle of rotation and the second angle of rotation being different from each other.
Claims26
A polarization-modulating optical element having a thickness profile and comprising an optically active crystal with an optic axis, wherein:
- the thickness profile, as measured in the direction of the optic axis, is variable;
- and
- the polarization-modulating optical element comprises at least two portions positioned in a common plane, the at least two portions having different values for a parameter selected from the group consisting of thickness and effective optical thickness as measured in the direction of the optic axis, wherein at least one of the portions comprises planar opposing surfaces that are parallel and is formed from the optically active crystal and the optic axis is orthogonal to the common plane.
A polarization-modulating optical element, configured so that, when interacting with the polarization-modulating element, a plane of oscillation of a first linearly polarized light ray and the plane of oscillation of a second linearly polarized light ray are rotated, respectively, by a first angle of rotation and a second angle of rotation so that the first angle of rotation is different from the second angle of rotation,
- wherein the polarization-modulating optical element comprises an optically active material having an optic axis, and the polarization-modulating optical element comprises at least two portions positioned in a common plane, the at least two portions having different values for a parameter selected from the group consisting of thickness and effective optical thickness, where at least one of the portions comprises planar opposing surfaces that are parallel and is formed from the optically active material and the optic axis is orthogonal to the common plane.
Dependencies are inferred from the claim text.