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US 8,288,835 B2Granted
Microshells with integrated getter layer
AssigneeSilicon Laboratories Inc.
InventorsEmmanuel P. Quevy, Pezhman Monadgemi, Roger T. Howe
Life of this patent
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Abstract
Microshells including a perforated pre-sealing layer and an integrated getter layer are provided. The integrated getter layer may be disposed between other layers of a perforated pre-sealing layer. The perforated pre-sealing layer may include at least one perforation, and a sealing layer may be provided on the pre-sealing layer to close the perforation.
Claims26
A microshell comprising:
- a perforated pre-sealing layer to partially enclose a chamber on a substrate and comprising at least one perforation defined therein, wherein the pre-sealing layer further comprises an integrated getter layer disposed between other layers of the perforated pre-sealing layer;
- and
- a sealing layer on the pre-sealing layer to close the perforation.
A method of forming a microshell over a substrate comprising:
- forming a sacrificial layer over the substrate;
- forming a pre-sealing layer on the sacrificial layer, the pre-sealing layer comprising a first layer formed on the sacrificial layer, a getter layer formed on the first layer, and a second layer formed on the getter layer;
- perforating the layers of the pre-sealing layer to expose the sacrificial layer;
- removing the sacrificial layer to form a chamber around a device under the pre-sealing layer;
- and
- sealing the perforated pre-sealing layer to form the microshell comprising:
- a perforated pre-sealing layer to partially enclose the chamber on the substrate and comprising at least one perforation defined therein, wherein the pre-sealing layer further comprises an integrated getter layer disposed between other layers of the perforated pre-sealing layer;
- and
- a sealing layer on the pre-sealing layer to close the perforation.
6 more elements
Dependencies are inferred from the claim text.