Photocurable resin composition and a method for forming a pattern
AssigneeHitachi Chemical Company, Ltd.
InventorsMasahiko Ogino, Makoto Kaji, Hanako Yori
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AssigneeHitachi Chemical Company, Ltd.
InventorsMasahiko Ogino, Makoto Kaji, Hanako Yori
Estimating the term…
A photocurable resin composition containing a photopolymerization initiator and a (meth)acrylate monomer and/or oligomer, said (meth)acrylate monomer or oligomer having a cyclic structure, in which the atomic weight of carbon (Mcr) in said cyclic structure and the number of whole carbon atoms (MTOT) in said composition have the relation of Mcr/MTOT>0.1, or the total number (N) of carbon atoms in said cyclic structure, the total number of carbon atoms (Nc) in said composition and the total number of oxygen atoms (No) have the relation of N/(Nc−No)<4, and the composition has a kinetic viscosity of 10 mPa·s or below. This low-viscosity photocurable resin composition has excellent dry etching resistance and is applicable to optical nanoprinting.
A photocurable resin composition comprising a photopolymerization initiator and more than one (meth)acrylate monomer,
A method for forming a pattern comprising the steps of:
A method for forming a pattern comprising the steps of:
Dependencies are inferred from the claim text.