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US 8,286,261 B2Granted
Scanning probe in pulsed-force mode, digital and in real time
AssigneeWitec Wissenchaftliche Instrumente und Technologie GmbH
InventorsPeter Spizig, Detief Sanchen, Jörg Förstner, Joachim Koenen, Othmar Marti, Gerhard Volswinkler
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Abstract
A microscope, in particular a scanning probe microscope, comprising a programmable logic device.
Claims23
A microscope for scanning the surface of a sample, comprising:
- a scanning probe;
- a scanning platform that supports the sample and that is movable in up to three dimensions relative to the scanning probe to measure different points on the sample surface;
- a programmable logic device operably connected to the scanning probe and the scanning platform and configured for closed loop control, the programmable logic device having one or more field programmable gate arrays (FPGAs);
- and
- wherein said microscope is a scanning microscope selected from the group of scanning microscopes consisting of:
- a scanning force microscope, a scanning tunnelling microscope, a near-field scanning optical microscope, a confocal Raman scanning microscope, a photonic force microscope, and a scanning electron microscope.
3 more elements
A scanning microscope for producing an image of a surface of a sample supported by a platform, comprising:
- a scanning probe configured to interact with the sample surface to measure a point on the sample surface by moving the platform;
- a control unit operably connected to the scanning probe and the platform, the control unit having a programmable logic device comprising a plurality of logic components operably interconnected using a net list and freely configurable circuits in accordance with a circuit diagram to perform closed-loop control of the scanning probe;
- and
- wherein the programmable logic device includes at least one field programmable gate array (FPGA).
1 more element
Dependencies are inferred from the claim text.