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US 8,285,089 B2Granted
MEMS device fabricated on a pre-patterned substrate
AssigneeQUALCOMM MEMS Technologies, Inc.
InventorClarence Chui
Life of this patent
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Abstract
A microelectromechanical systems device fabricated on a pre-patterned substrate having grooves formed therein. A lower electrode is deposited over the substrate and separated from an orthogonal upper electrode by a cavity. The upper electrode is configured to be movable to modulate light. A semi-reflective layer and a transparent material are formed over the movable upper electrode.
Claims25
An electromechanical systems device comprising:
- a substrate having a plurality of trenches in a top surface of the substrate;
- and
- a movable electrode layer over the top surface of the substrate and in the trenches, wherein the movable electrode layer is discontinuous between inside the trenches and outside the trenches such that the movable electrode layer outside the trenches forms a plurality of movable electrodes separated from one another.
An electromechanical systems device comprising:
- a substrate having a top surface, wherein a plurality of grooves is formed in the top surface;
- and
- a conductive layer over the substrate and inside the grooves such that the conductive layer is discontinuous at the grooves, forming strips of the conductive layer inside the grooves and strips of the conductive layer outside the grooves, wherein the strips of the conductive layer outside the grooves form conductive lines that are isolated from the strips of the conductive layer inside the grooves.
An electromechanical systems device, comprising
- a substrate having a plurality of grooves formed therein;
- and
- a first plurality of conducting means formed over a top surface of the substrate and a second plurality of conducting means, wherein the first plurality of conducting means and the second plurality of conducting means are insulated from each other and separated by cavities,
- wherein the first plurality of conducting means are alternated with and separated by the plurality of grooves.
1 more element
Dependencies are inferred from the claim text.