Methods of fabricating MEMS with spacers between plates and devices formed by same

A method of making a microelectromechanical system (MEMS) device, the method comprising:

• providing a front substrate comprising a first support extending from the front substrate;
• providing a backplate having a surface;
• attaching the front substrate to the backplate such that the first support is interposed between the front substrate and the surface of the backplate;
• and
• forming a second support between the first support of the front substrate and the surface of the backplate such that the second support extends from and is integrally formed with the surface of the backplate, wherein the second support comprises a post.

A method of making a microelectromechanical system (MEMS) device, the method comprising:

• providing a front substrate comprising a first support extending from the front substrate;
• providing a backplate having a surface;
• providing a moving electrode between the front substrate and the backplate such that a portion of the moving electrode is supported on the first support;
• attaching the front substrate to the backplate such that the first support is interposed between the front substrate and the surface of the backplate;
• and
• forming a second support between the first support of the front substrate and the surface of the backplate such that the second support extends from and is integrally formed with the surface of the backplate.

A method of making a microelectromechanical system (MEMS) device, the method comprising:

• providing a front substrate comprising a first support extending from the front substrate;
• providing a backplate having a surface;
• attaching the front substrate to the backplate such that the first support is interposed between the front substrate and the surface of the backplate;
• and
• forming a second support between the first support of the front substrate and the surface of the backplate such that the second support extends from and is integrally formed with the surface of the backplate, wherein forming the second support comprises forming the second support to contact the first support of the front substrate.

A method of making a microelectromechanical system (MEMS) device, the method comprising:

• providing a front substrate comprising a first support extending from the front substrate;
• providing a backplate having a surface;
• attaching the front substrate to the backplate such that the first support is interposed between the front substrate and the surface of the backplate;
• and
• forming a second support between the first support of the front substrate and the surface of the backplate such that the second support extends from and is integrally formed with the surface of the backplate, wherein forming the second support comprises embossing the backplate.