Resonator electrode shields

A system for generating a timing signal, the system comprising:

• a micro-electromechanical system (MEMS) resonator that includes at least one active element, wherein, in operation, the at least one active element is configured to oscillate in a first resonant mode;
• at least one drive electrode configured to conduct a time-varying signal that causes the at least one active element to oscillate;
• at least one sense electrode configured to conduct a time-varying current in response to the oscillations of the at least one active element;
• and
• at least one resonator electrode shield which is electrically connected to an electrical ground source and physically disposed to cover a portion of the at least one active element that prevents the active element from oscillating in a second resonant mode that is different from the first resonant mode.

A system for generating a timing signal, the system comprising:

• a micro-electromechanical system (MEMS) resonator that includes at least one non-active element and at least one active element, wherein, in operation, the at least one active element is configured to oscillate in a resonant mode;
• at least one drive electrode configured to conduct a time-varying signal that causes the at least one active element to oscillate;
• at least one sense electrode configured to conduct a time-varying current in response to the oscillations of the at least one active element;
• and
• a first resonator electrode shield which is electrically connected to an electrical ground source and physically disposed between (i) the at least one sense electrode and (ii) the at least one non-active element, wherein the first resonator electrode shield is configured to reduce an interfering signal in the at least one sense electrode, which is associated with a time varying voltage of the at least one non-active element.

A system for generating a timing signal, the system comprising:

• a micro-electromechanical system (MEMS) resonator that includes at least one non-active element, which includes a support element or a flexure element, and at least one active element, wherein, in operation, the at least one active element is configured to oscillate in a resonant mode;
• at least one drive electrode configured to conduct a time-varying signal that causes the at least one active element to oscillate;
• at least one sense electrode configured to conduct a time-varying current in response to the oscillations of the at least one active element;
• and
• a first resonator electrode shield which is electrically connected to an electrical ground source and physically disposed between (i) the at least one sense electrode and (ii) the at least one drive electrode, wherein the first resonator electrode shield is configured to reduce capacitance coupling between the at least one sense electrode and the at least one drive electrode.