Thin film magnetic field sensor
AssigneeHoneywell International Inc.
InventorsXinhui Mao, HuanBin Fang
Life of this patent
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Abstract
A magnetic field effect sensor system having giant magneto-impedance elements. The elements may be elongated strips, and in proximity to and parallel with one another, and connected in series with connections or electrodes. The elements may have a regular shape without turns. They may have a single- or multi-layer structure. Some of the layers in the elements may contain a soft magnetic material, for instance, which form a closed loop for magnetic flux around a non-magnetic conductor.
Claims9
A magnetic sensor comprising:
- a substrate;
- two or more magnetic field sensitive elements positioned on the substrate along a length thereof;
- and
- at least one connector for connecting the two or more elements in series;
- wherein the elements are elongated, along-side each other and approximately parallel to each other;
- and
- wherein:
- an element comprises:
- a non-magnetic conductor;
- and
- at least one soft magnetic material layer situated on the non-magnetic conductor;
- and
- at least one soft magnetic material layer is for providing a path for magnetic flux around the non-magnetic conductor.
A magnetic field sensor comprising:
- a substrate having a length and a width;
- a plurality of impedance elements disposed on the substrate;
- and
- a plurality of connectors for connecting the elements in series;
- and
- wherein:
- the elements are approximately parallel to one another and spaced a distance from one another along the length of the substrate;
- the elements are relatively straight giant magneto-impedance elements;
- and
- an element comprises:
- a first soft magnetic layer;
- a non-magnetic and conductive layer adjacent to the first soft magnetic layer;
- and
- a soft magnetic layer adjacent to the non-magnetic and conductive layer;
- and
- wherein the first soft magnetic layer and the second soft magnetic layer have a width sufficiently larger than the non-magnetic and conductive layer so as to be in contact with each other to result in a closed loop for magnetic flux around the non-magnetic and conductive layer.
A magnetic field sensor comprising:
- a substrate having a length and a width;
- a plurality of impedance elements disposed on the substrate;
- and
- a plurality of connectors for connecting the elements in series;
- and
- wherein:
- the elements are approximately parallel to one another and spaced a distance from one another along the length of the substrate;
- the elements are relatively straight giant magneto-impedance elements;
- and
- an element comprises:
- a first soft magnetic layer;
- a first insulator adjacent to the first soft magnetic layer;
- a non-magnetic and conductive layer adjacent to the first insulator layer;
- a second insulator layer adjacent to the non-magnetic and conductive layer;
- and
- a second soft magnetic layer adjacent to the second insulator layer.
A method for making a magnetic field sensor comprising:
- forming a plurality of strips on a substrate along a length of the substrate;
- and
- connecting the strips in series with electrodes;
- and
- wherein:
- the strips are magneto-impedance elements;
- and
- the strips are situated approximately parallel and proximate to one another
- a strip of the plurality of strips comprises:
- a soft magnetic layer;
- a non-magnetic and conductive layer on the soft magnetic layer;
- and
- a soft magnetic layer on the non-magnetic and conductive layer;
- and
- wherein the first and the second soft magnetic layers are in contact with each other.
Dependencies are inferred from the claim text.