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US 8,283,835 B2Granted
Guided bulk acoustic wave device having reduced height and method for manufacturing
AssigneeEpcos AG
InventorsThomas Metzger, Christoph Eggs, Werner Ruile
Life of this patent
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Abstract
Guided bulk acoustic wave devices and method for manufacturing guided bulk acoustic wave devices are provided. A guided bulk acoustic wave device includes a resonator structure with a piezoelectric layer, an electrode layer for exciting guided bulk acoustic waves and a wave guide layer. The thickness of the piezoelectric layer is less than or equal to 50 μm.
Claims23
A guided bulk acoustic wave device comprising:
- a substrate layer;
- and
- a first layer stack arranged over the substrate layer,
- wherein the first layer stack comprises a first resonator structure with a piezoelectric layer, a first electrode layer for exciting guided bulk acoustic waves, and a waveguide layer
- wherein the first electrode layer is arranged between the piezoelectric layer and the waveguide layer,
- wherein the piezoelectric layer has a thickness less than or equal to 50 micrometers,
- wherein the first electrode layer comprises two electrodes with interdigitated electrode fingers, and
- wherein an angle between a piezoelectric axis of the piezoelectric layer and an axis perpendicular to the piezoelectric layer is between 5° and 15°.
5 more elements
A guided bulk acoustic wave device comprising:
- a substrate layer;
- a layer stack arranged over the substrate layer, the layer stack comprising:
- a first resonator structure comprising a piezoelectric layer, an electrode layer for exciting guided bulk acoustic waves, and a waveguide layer;
- and
- a second resonator structure arranged over the first resonator structure, the second resonator structure comprising a piezoelectric layer, a first electrode layer for exciting guided bulk acoustic waves, and a waveguide layer,
- wherein the piezoelectric layer of the first resonator structure or the piezoelectric layer of the second resonator structure has a thickness less than 50 micrometer,
- wherein the electrode layer comprises two electrodes with interdigitated electrode fingers, and
- wherein an angle between a piezoelectric axis of the piezoelectric layer and an axis perpendicular to the piezoelectric layer is between 5° and 15°.
5 more elements
Dependencies are inferred from the claim text.