Robot drive with magnetic spindle bearings

A drive section for a substrate transport arm comprising:

• a frame;
• at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section;
• and
• a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section;
• wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least the substantially contactless support of the coaxial spindle and substantially solid state leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section.