Semiconductor device
AssigneeHynix Semiconductor Inc.
InventorsWon-John Choi, Su-Hyun Kim
Life of this patent
Estimating the term…
Abstract
A semiconductor device includes a through-silicon-via arranged to couple a plurality of stacked semiconductor chips, an interconnection line coupled to the through-silicon-via at one side and arranged to couple the through-silicon-via to the semiconductor chip, an internal interconnection line disposed at the other side of the interconnection line and intersected with the interconnection line, and at least one first contact disposed to couple the internal interconnection line to the interconnection line. A region of the interconnection line in which the internal interconnection line is disposed is equally divided, and an area between the divided regions is removed.
Claims8
A semiconductor device comprising:
- a through-silicon-via arranged to couple a plurality of stacked semiconductor chips;
- an interconnection line coupled to the through-silicon-via and arranged to couple the through-silicon-via to a respective one of the semiconductor chips;
- an internal interconnection line disposed at a side of the interconnection line and intersected with the interconnection line;
- and
- at least one first contact disposed to couple the internal interconnection line to the interconnection line,
- wherein a region of the interconnection line in which the internal interconnection line is disposed is equally divided, and an area between the divided regions is removed.
A semiconductor device comprising:
- a through-silicon-via arranged to couple a plurality of stacked semiconductor chips;
- an interconnection line coupled to the through-silicon-via and arranged to couple the through-silicon-via to a respective one of the semiconductor chips;
- a first internal interconnection line disposed at one side of the interconnection line and intersected with the interconnection line;
- a second internal interconnection line disposed at the other side of the interconnection line and intersected with the interconnection line;
- at least one first contact disposed to couple the first internal interconnection line to the interconnection line;
- and
- at least one second contact disposed to couple the second internal interconnection line to the interconnection line, wherein a region of the interconnection line intersected with the first and second internal interconnection lines is equally divided, and an area between the divided regions is removed.
A semiconductor device comprising:
- a through-silicon-via arranged to couple a plurality of stacked semiconductor chips;
- and
- an interconnection line having equally divided regions and electrically coupling a respective one of the semiconductor chips with the through-silicon-via,
- wherein a region between the equally divided regions is removed as a dummy region.
Dependencies are inferred from the claim text.