Interconnect regions
AssigneeMicron Technology, Inc.
InventorsKyle K. Kirby, Philip J. Ireland
Life of this patent
Estimating the term…
Abstract
Some embodiments include interconnect regions. The regions may contain, along a cross section, a closed-shape interior region having an electrically conductive material therein, a first dielectric material configured as a liner extending entirely around a lateral periphery of the interior region, and at least two dielectric projections joining to the dielectric material liner and being laterally outward of the interior region. The dielectric projections may have an outer dielectric ring surrounding an inner dielectric region. The outer ring may consist of the first dielectric material and the inner dielectric region may be a composition different from a composition of the first dielectric material, and in some embodiments the composition within the inner dielectric region may be gaseous.
Claims22
An interconnect region, comprising along a cross-section:
- a closed-shape interior region having an electrically conductive material therein;
- a first dielectric material configured as a liner extending entirely around a lateral periphery of the interior region;
- and
- at least two dielectric projections joining to the dielectric material liner and being laterally outward of the interior region;
- the dielectric projections having an outer dielectric ring surrounding an inner dielectric region;
- the outer dielectric ring consisting of the first dielectric material and the inner dielectric region comprising a composition different from a composition of the first dielectric material.
An interconnect region, comprising along a cross-section:
- a substantially circular interior region having a copper-containing interconnect therein;
- a first dielectric material configured as a liner extending entirely around a lateral periphery of the interconnect;
- and
- at least two substantially triangular-shaped dielectric projections joining to the dielectric material liner and being laterally outward of the interior region;
- the dielectric projections having an outer dielectric ring surrounding an inner dielectric region;
- the outer dielectric ring consisting of the first dielectric material and the inner dielectric region comprising a composition different from a composition of the first dielectric material.
Dependencies are inferred from the claim text.