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US 8,283,687 B2Granted
Light emitting device and method of manufacturing the same
AssigneesSeoul Opto Device Co., Ltd., Postech Academy-Industry Foundation
InventorJong-Lam Lee
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Abstract
Provided are a vertical-type light emitting device and a method of manufacturing the same. The light emitting device includes a p-type semiconductor layer, an active layer, and an n-type semiconductor layer that are stacked, a cover layer disposed on a p-type electrode layer to surround the p-type electrode layer, a conductive support layer disposed on the cover layer, and an n-type electrode layer disposed on the n-type semiconductor layer.
Claims37
A light emitting device, comprising:
- an n-type semiconductor layer, an active layer, and a p-type semiconductor layer;
- a p-type electrode layer and an etch stop layer arranged on the p-type semiconductor layer;
- a cover layer arranged on the p-type electrode layer and the etch stop layer;
- a conductive support layer arranged on the cover layer;
- and
- an n-type electrode layer arranged on the n-type semiconductor layer.
3 more elements
A method of manufacturing a light emitting device, the method comprising:
- forming an n-type semiconductor layer, an active layer, and a p-type semiconductor layer on an insulating substrate;
- forming a p-type electrode layer and an etch stop layer on the p-type semiconductor layer so that the p-type electrode layer and the etch stop layer are spaced apart from each other;
- forming a cover layer on the p-type electrode layer, the cover layer surrounding the p-type electrode layer;
- removing the insulating substrate after forming a conductive support layer on the cover layer;
- etching the n-type semiconductor layer, the active layer, and the p-type semiconductor layer to expose the etch stop layer;
- forming a passivation layer to surround the etched n-type semiconductor layer, the etched active layer, and the etched p-type semiconductor layer;
- forming an n-type electrode layer on the etched n-type semiconductor layer;
- and
- separating light emitting devices to form each light emitting device.
6 more elements
Dependencies are inferred from the claim text.