Positioning device for a particle beam apparatus

A positioning device for a particle beam apparatus, comprising:

• at least one positionable holder for holding an object;
• at least one light source for generating a light beam which is guidable in the direction of the positionable holder;
• at least one detector for detecting the light beam;
• and
• at least one injection area in which particles of a particle beam are injected, wherein the particles are guidable in the direction of the positionable holder, wherein the light beam passes through the injection area, wherein the injection area has an output side for the light beam and the particle beam, the output side being directed toward the holder, wherein the detector includes a detector element disposed in an area between the output side and the holder, wherein the light source includes a light source element disposed in an area which extends away from the holder, starting from the output side, and wherein at least one of the following is further provided:
• (i) wherein the light beam is provided both for positioning the positionable holder and for cleaning an object which is disposed on the positionable holder;
• or
• (ii) wherein at least two light sources are provided for generating light beams, namely a first light source for generating a first light beam and a second light source for generating a second light beam, wherein the first light beam is provided for positioning the positionable holder, and wherein the second light beam is provided for cleaning an object which is disposed on the positionable holder.

A particle beam apparatus, comprising:

• at least one particle beam generator for generating a particle beam;
• at least one positionable holder for holding an object;
• at least one objective for focusing the particle beam onto the object;
• at least one light source for generating a light beam for illuminating the object;
• at least one detector for detecting the light beam;
• and
• at least one injection area for injecting the particle beam in such a way that the particle beam is guidable in the direction of the positionable holder, wherein the light beam passes through the injection area, wherein the injection area has an output side for the light beam and the particle beam, the output side being directed toward the holder, wherein the detector includes a detector element disposed in an area between the output side of the injection area and the holder, and wherein the light source includes a light source element disposed in an area which extends away from the holder, starting from the output side.

A particle beam apparatus, comprising:

• at least one particle beam generator for generating a particle beam;
• at least one positionable holder for holding an object;
• at least one objective for focusing the particle beam onto the object;
• at least one light source for generating a light beam for illuminating the object;
• at least one detector for detecting the light beam;
• and
• at least one injection area for injecting the particle beam in such a way that the particle beam is guidable in the direction of the positionable holder, wherein the light beam passes through the injection area, wherein the injection area has an output side for the light beam and the particle beam, the output side being directed toward the holder, wherein the detector includes a detector element disposed in an area between the output side and the holder, wherein the light source includes a light source element disposed in an area which extends away from the holder, starting from the output side, and wherein at least one of the following is further provided:
• (i) wherein the light beam is provided both for positioning the positionable holder and for cleaning an object disposed on the positionable holder;
• or
• (ii) wherein at least two light sources are provided for generating light beams, namely a first light source for generating a first light beam and a second light source for generating a second light beam, wherein the first light beam is provided for positioning the positionable holder, and wherein the second light beam is provided for cleaning an object disposed on the positionable holder.