Laser processing apparatus and laser processing method, debris collection mechanism and debris collection method, and method for producing display panel

A laser processing method for patterning a resin or a metal film formed on a substrate using laser light on the resin film or the metal film, the laser processing method comprising:

• providing a laser light source;
• bringing closer to the substrate a debris collection device having (a) an enclosure, (b) a transmission window at one side of the enclosure through which laser light emitted by the laser light source can be transmitted, (c) a transmission hole at an opposite side of the enclosure through which the laser light can be transmitted after passing through the enclosure, (d) a vortex generation mechanism in the form of a plate having a plurality of radial grooves and located at the side of the enclosure where the transmission hole is located and that generates a vortex gas flow at a side of the plate facing the enclosure and a suction force at an oppositely facing side of the plate to suck debris created by irradiation of the laser light on a surface to entrain the debris in the vortex gas flow, (e) an exhaust port in the enclosure through which gas can be exhausted and (f) a screening device positioned between the vortex generation mechanism and the enclosure and having an opening through which the laser light passes in a first direction and through which gas from the gas flows in an opposite second direction into the enclosure;
• irradiating the resin or the metal film with the laser light;
• entraining debris generated by the laser light irradiation on the resin film or the metal film in the vortex gas flow generated by the vortex generation mechanism;
• and
• screening the vortex gas flow with the screening device to remove the debris therefrom.

A laser processing apparatus for patterning a resin film or a metal film formed on a substrate using laser light, the laser processing apparatus comprising:

• a laser light source emitting laser light;
• and
• a debris collection device including (a) an enclosure, (b) a transmission window at one side of the enclosure through which laser light emitted by the laser light source can be transmitted, (c) a transmission hole at an opposite side of the enclosure through which the laser light can be transmitted after passing through the enclosure, (d) a vortex generation mechanism in the form of a plate having a plurality of radial grooves and located at the side of the enclosure where the transmission hole is located and that generates a vortex gas flow at a side of the plate facing the enclosure and a suction force at an oppositely facing side of the plate to suck debris created by irradiation of the laser light on a surface and entrain the debris in the vortex gas flow, (e) an exhaust port in the enclosure through which gas can be exhausted and (f) a screening device positioned between the vortex generation mechanism and the enclosure and having an opening through which the laser light passes in a first direction and through which gas from the gas flows in an opposite second direction into the enclosure,
• wherein,
• the vortex generation mechanism of the debris collection device is placed close to the resin film or the metal film on the substrate, and
• the debris entrained in the vortex gas flow is screened and is removed from the vortex gas flow prior to entering the enclosure by the screening device.