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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsThomas Merelle, Gerben Doornbos, Robert James Pascoe Lander
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A method and circuit in which the drive strength of a FinFET transistor can be selectively modified, and in particular can be selectively reduced, by omitting the LDD extension formation in the source and/or in the drain of the FinFET. One application of this approach is to enable differentiation of the drive strengths of transistors in an integrated circuit by applying the technique to some, but not all, of the transistors in the integrated circuit. In particular in a SRAM cell formed from FinFET transistors the application of the technique to the pass-gate transistors, which leads to a reduction of the drive strength of the pass-gate transistors relative to the drive strength of the pull-up and pull-down transistors, results in improved SRAM cell performance.
A method of forming a circuit comprising at least a first fin Field Effect Transistor (finFET) and a second finFET, the at least first and second finFETs being formed on a substrate and comprising a fin formed on the substrate, a first high density doped (HDD) region and a second high density doped (HDD) region formed in the substrate at longitudinal ends of the fin and at least one gate region formed adjacent the fin, where the drive strength of the first finFET is selected to be higher than the drive strength of the second finFET, by forming the first finFET with at least one of a first low density doped (LDD) extension region in the substrate extending from the first HDD region toward the gate region and a second low density doped (LDD) extension region in the substrate extending from the second HDD region toward the gate region;
A circuit comprising at least a first and second fin Field Effect Transistors (finFET), the at least first and second finFETs being formed on a substrate and comprising a fin formed on the substrate, a first high density doped (HDD) region and a second high density doped (HDD) region formed in the substrate at longitudinal ends of the fin and at least one gate region formed adjacent the fin, wherein the first finFET has at least one of a first low density doped (LDD) extension region in the substrate extending from the first HDD region toward the gate region and a second low density doped (LDD) extension region in the substrate extending from the second HDD region toward the gate region;
Dependencies are inferred from the claim text.