Sulfonic acid salt and derivative thereof, photoacid generator agent, and resist material and pattern formation method using the photoacid generator agent

A fluorinated sulfonic acid onium salt represented by the following general formula (3)

• where n indicates an integer of 1 to 10;
• R indicates a substituted or unsubstituted C1-C20 linear, branched or cyclic alkyl group, a substituted or unsubstituted C1-C20 linear, branched or cyclic alkenyl group, a substituted or unsubstituted C6-C15 aryl group, or a C4-C15 heteroaryl group;
• and Q+ indicates a sulfonium cation of the following general formula (a) or the following general formula (b) or a iodonium cation of the following general formula (c)
• where R1, R2 and R3 each independently indicate a substituted or unsubstituted C1-C10 linear or branched alkyl, alkenyl or oxoalkyl group, or a substituted or unsubstituted C6-C18 aryl, aralkyl or aryloxoalkyl group;
• and two or more of R1, R2 and R3 may be bonded to each other to form a ring structure with a sulfur atom in the formula
• where R4 indicates a substituted or unsubstituted C1-C20 linear, branched or cyclic alkyl or alkenyl group, or a substituted or unsubstituted C6-C14 aryl group;
• r indicates an integer of 1 to 5;
• and q indicates 0 or 1
• where R4 indicates a substituted or unsubstituted C1-C20 linear, branched or cyclic alkyl or alkenyl group, or a substituted or unsubstituted C6-C14 aryl group;
• r indicates an integer of 1 to 5;
• and q indicates 0 or 1.

A fluorinated N-sulfonyloxyimide compound represented by the following general formula (4)

• where n indicates an integer of 1 to 10;
• R indicates a substituted or unsubstituted C1-C20 linear, branched or cyclic alkyl group, a substituted or unsubstituted C1-C20 linear, branched or cyclic alkenyl group, a substituted or unsubstituted C6-C15 aryl group, or a C4-C15 heteroaryl group;
• Z indicates a single bond, a double bond, a methylene group or an oxygen atom;
• T and Y each independently indicate a hydrogen atom or a substituted or unsubstituted C1-C10 alkyl group;
• and T and Y may form an aliphatic cyclic structure, an aromatic ring structure or a heterocyclic structure in cooperation with each other and with carbon atoms bonded thereto.

A fluorinated oxime sulfonate compound represented by the following general formula (5)

• where n each independently indicates an integer of 1 to 10;
• R indicates a substituted or unsubstituted C1-C20 linear, branched or cyclic alkyl group, a substituted or unsubstituted C1-C20 linear, branched or cyclic alkenyl group, a substituted or unsubstituted C6-C15 aryl group, or a C4-C15 heteroaryl group;
• m indicates 0 or 1;
• p indicates a substituted or unsubstituted C1-C20 alkyl group or a substituted or unsubstituted C6-C15 aryl group in the case of m=0 and indicates a single bond, a substituted or unsubstituted C1-C20 alkylene group or a substituted or unsubstituted C6-C15 arylene group in the case of m=1;
• A indicates a cyano group, a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a 5H-perfluoropentyl group, a 6H-perfluorohexyl group, a nitro group or a methyl group;
• and, in the case of m=1, both of A may be bonded to each other to form a six-carbon ring with carbon atoms bonded thereto.