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US 8,282,906 B2Granted
Remote plasma synthesis of metal oxide nanoparticles
Assignee3M Innovative Properties Company
InventorsRajesh K. Katare, Moses M. David
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Abstract
A method of synthesizing nanoparticles, comprising providing a precursor comprising a titanium alkoxide compound; forming a plasma from oxygen gas at a first location, wherein the plasma comprises plasma products that contain oxygen atoms; causing the plasma products to flow to a second location remote from the first location; contacting the precursor with the plasma products at the second location so as to oxidize the precursor and form nanoparticles; and collecting the nanoparticles with a collector.
Claims6
A method for synthesizing nanoparticles, which method comprises:
- forming a plasma from oxygen gas at a first location, wherein the plasma comprises plasma products that contain oxygen atoms;
- causing the plasma products to flow to a second location;
- contacting a precursor comprising a titanium alkoxide compound with the plasma products at the second location so as to oxidize the precursor and form nanoparticles;
- and
- collecting the nanoparticles;
- wherein the second location is a reaction chamber;
- wherein the reaction chamber and the first location are joined by a conduit having a length of 2 to 300 centimeters;
- and
- wherein the plasma products travel from the first location, through the conduit, prior to contacting the precursor in the reaction chamber.
6 more elements
Dependencies are inferred from the claim text.