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AssigneeTosoh Corporation
InventorShigeru Hirano
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An agent for rendering harmless a halogen-containing gas such as a halogen-containing exhaust gas, which comprises a faujasite zeolite having a SiO2/Al2O3 ratio of 2.0 to 2.3 and containing at least one cation selected from alkali metal cations and alkaline earth metal cations. The cation is preferably selected from Na and K, and, more preferably, the cation comprises at least 70 mol % of Na and not larger than 30 mol % of K. The agent is used in the form of a molded body made using a binder.
A method of rendering a halogen-containing gas harmless, which comprises contacting a halogen-containing gas having a concentration of halogen or a halogen-containing compound in the range of 0.1 to 10% by volume at a temperature in the range of 20 to 30° C. with an agent comprising a faujasite zeolite having a SiO2/Al2O3 ratio in the range of 2.0 to 2.1 and containing at least one cation selected from the group consisting of Na cation, K cation, and alkaline earth metal cations.
Dependencies are inferred from the claim text.
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About 1 year 7 months of term left · ends 31 May 2028 (estimated)
(1) Field of the Invention
This invention relates to an agent for rendering harmless a halogen-containing gas such as a halogen-containing exhaust gas from, for example, an etching step in the process of producing a semiconductor device or a liquid crystal device, a CVD (chemical vapor deposition) process, and a cleaning process; and a method of rendering a halogen-containing gas harmless using the agent.
(2) Description of the Related Art
The zeolite-comprising agent for rendering a halogen-containing gas harmless (which agent is hereinafter referred to as “harm-removing agent” when appropriate), and the method of rendering a halogen-containing gas harmless using the harm-removing agent, according to the present invention, will be described in detail.
The halogen-containing gas-removing agent according to the present invention comprises a faujasite zeolite having a SiO2/Al2O3 ratio in the range of 2.0 to 2.3 by mole and containing at least one cation selected from the group consisting of alkali metal cations and alkaline earth metal cations.
The faujasite zeolite as used in the present invention has a SiO2/Al2O3 ratio of 2.0 to 2.3 by mole, preferably 2.0 to 2.2 by mole and more preferably 2.0 to 2.1 by mole.