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AssigneeNGK Insulators, Ltd.
InventorsKazuyuki Kaigawa, Hirofumi Yamaguchi
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A (Li, Na, K)(Nb, Ta, Sb)O3 based piezoelectric material is a sintered body having a surface microstructure that comprises microscopic grains having a grain diameter of less than 5 μm, intermediate grains having a grain diameter of 5 μm or more and less than 15 μm, and coarse grains having a grain diameter of 15 μm or more and 50 μm or less. The amount of coarse grains is 3% or more in a share of grains in terms of area. The piezoelectric material can be manufactured by mixing metal-containing compounds so as to give the above-mentioned formulation, calcining the mixture and then crushing the resultant to obtain a calcined/crushed powder, then keeping temperature constantly at a temperature within a range from 800 to 950° C. for a predetermined period of time in a constant temperature keeping process, and raising temperature to firing temperature for sintering.
A (Li, Na, K)(Nb, Ta, Sb)O3 based piezoelectric material, wherein a sintered body of said (Li, Na, K)(Nb, Ta, Sb)O3 based piezoelectric/electrostrictive material includes Sb, and has a surface microstructure of microscopic grains having a grain diameter of less than 5 μm, intermediate grains having a grain diameter of 5 μm or more and less than 15 μm, and coarse grains having a grain diameter of 15 μm or more and 50 μm or less, wherein an amount of the coarse grains is 3% or more in a share of grains in terms of area.
A manufacturing method of a (Li, Na, K) (Nb, Ta, Sb)O3 based piezoelectric material including Sb, wherein chemical compounds having metal elements are mixed so as to have a composition expressed by (Li, Na, K) (Nb, Ta, Sb) O3, including Sb, the mixture is calcined and crushed to obtain a calcined/crushed powder, then, in a constant temperature keeping process, a temperature is kept constantly at a temperature within a range from 800 to 950° C. for a predetermined period of time in a heating process of a sintering schedule, and then temperature is raised to firing temperature for sintering.
Dependencies are inferred from the claim text.