Methods to improve the in-film defectivity of PECVD amorphous carbon films

A showerhead having an aluminum surface coated with a nitrogen containing amorphous carbon layer, the nitrogen containing amorphous carbon layer applied by a method comprising:

• placing the showerhead into a processing chamber;
• flowing a first gas comprising a carbon source into the processing chamber;
• flowing a second gas comprising a nitrogen source into the processing chamber;
• forming a plasma in the chamber;
• and
• depositing the nitrogen containing amorphous carbon layer on the aluminum surface, wherein the second gas has a flow rate between about 100 sccm and about 15000 sccm.

A showerhead having an aluminum surface coated with a nitrogen containing amorphous carbon layer, the nitrogen containing amorphous carbon layer applied by a method comprising:

• placing the showerhead into a processing chamber;
• flowing a first gas comprising a carbon source into the processing chamber;
• flowing a second gas comprising a nitrogen source into the processing chamber;
• forming a plasma in the chamber;
• and
• depositing the nitrogen containing amorphous carbon layer on the aluminum surface, wherein the forming a plasma in the chamber comprises applying a RF power to an inert gas, wherein the RF power frequency is between about 0.01 MHz and 300 MHz.

A showerhead having an aluminum surface coated with a nitrogen containing amorphous carbon layer, the nitrogen containing amorphous carbon layer applied by a method comprising:

• placing the showerhead into a processing chamber;
• flowing a first gas comprising a carbon source into the processing chamber;
• flowing a second gas comprising a nitrogen source into the processing chamber;
• forming a plasma in the chamber;
• and
• depositing the nitrogen containing amorphous carbon layer on the aluminum surface, wherein the nitrogen containing amorphous carbon layer has a thickness between about 500 Å and about 3000 Å.

A showerhead having an aluminum surface coated with a nitrogen containing amorphous carbon layer, the nitrogen containing amorphous carbon layer applied by a method comprising:

• placing the showerhead into a processing chamber;
• flowing a first gas comprising a carbon source into the processing chamber;
• flowing a second gas comprising a nitrogen source into the processing chamber;
• forming a plasma in the chamber;
• and
• depositing the nitrogen containing amorphous carbon layer on the aluminum surface, wherein the nitrogen containing amorphous carbon layer is deposited on the showerhead before coupling the showerhead to a processing chamber.

A showerhead having an aluminum surface coated with a nitrogen containing amorphous carbon layer, the nitrogen containing amorphous carbon layer applied by a method comprising:

• placing the showerhead into a processing chamber;
• flowing a first gas comprising a carbon source into the processing chamber;
• flowing a second gas comprising a nitrogen source into the processing chamber;
• forming a plasma in the chamber;
• and
• depositing the nitrogen containing amorphous carbon layer on the aluminum surface, wherein placing the showerhead into a processing chamber comprises attaching the showerhead to the processing chamber.