Gas storage and dispensing system with monolithic carbon adsorbent
AssigneeAdvanced Technology Materials, Inc.
InventorJ. Donald Carruthers
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Abstract
A pyrolyzed monolith carbon physical adsorbent that is characterized by at least one of the following characteristics: (a) a fill density measured for arsine gas at 25° C. and pressure of 650 torr that is greater than 400 grams arsine per liter of adsorbent; (b) at least 30% of overall porosity of the adsorbent including slit-shaped pores having a size in a range of from about 0.3 to about 0.72 nanometer, and at least 20% of the overall porosity including micropores of diameter<2 nanometers; and (c) having a bulk density of from about 0.80 to about 2.0 grams per cubic centimeter, preferably from 0.9 to 2.0 grams per cubic centimeter.
Claims20
A fluid storage and dispensing apparatus, comprising a fluid storage and dispensing vessel with an interior volume in which is disposed an array of articles of pyrolyzed polyvinylidene chloride carbon monolith adsorbent, wherein the articles of pyrolyzed polyvinylidene chloride carbon monolith adsorbent occupies from 75% to 95% of the interior volume, and the adsorbent has (i) a bulk density of from 0.80 to 2.0 g per cubic centimeter of adsorbent, (ii) a fill density measured for arsine gas at 25° C. and pressure of 650 torr that is greater than 400 g arsine per liter of adsorbent, and (iii) porosity, at least 80% of which is constituted by pores with diameter<2 nm, and at least 60% of which is constituted by pores having size in a range of from 0.3 to 0.72 nm.
A pyrolyzed polyvinylidene chloride carbon monolith adsorbent having (i) a bulk density of from 0.80 to 2.0 g per cubic centimeter of adsorbent, (ii) a fill density measured for arsine gas at 25° C. and pressure of 650 torr that is greater than 400 g arsine per liter of adsorbent, and (iii) porosity, at least 80% of which is constituted by pores with diameter<2 nm, and at least 60% of which is constituted by pores having size in a range of from 0.3 to 0.72 nm.
Dependencies are inferred from the claim text.