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US 8,282,383 B2Granted
Method for expelling gas positioned between a substrate and a mold
AssigneeMolecular Imprints, Inc.
InventorsByung-Jin Choi, Sidlgata V. Sreenivasan, Ian Matthew McMackin, Pankaj B. Lad
Life of this patent
Estimating the term…
Abstract
The present invention is directed towards a system for expelling a gas positioned between a substrate and a mold, the substrate and the mold further having a liquid positioned therebetween.
Claims20
A system, comprising:
- a chuck body having first and second opposed sides, the first side including first and second spaced-apart recesses defining first and second spaced-apart support regions, with the first support region cincturing the second support region and the first and second recesses, and the second support region cincturing the second recess, and a fluid channel extending through the chuck body to the first recess;
- a mold assembly coupled to the first side of the chuck body, with a portion of the mold in superimposition with the first recess defining a first chamber and a portion of the mold in superimposition with the second recess defining a second chamber;
- and
- a pressure control system coupled to the chuck body to apply a vacuum pressure in the first chamber through the fluid channel bowing the first portion of the mold assembly towards the chuck body to bow the second portion of the mold assembly away from the chuck body.
1 more element
A system, comprising:
- a chuck body having first and second opposed sides, the first side including first and second spaced-apart recesses defining first and second spaced-apart support regions, and a fluid channel extending through the chuck body to the first recess;
- a template coupled to the first side of the chuck body, with a portion of the template adjacent with the first recess defining a first chamber and a portion of the template adjacent with the second recess defining a second chamber;
- and
- a pressure control system coupled to the chuck body to apply a vacuum pressure in the first chamber through a fluid channel bowing the first portion of the template towards the chuck body to bow the second portion of the template away from the chuck body.
1 more element
A system, comprising:
- a chuck body having a first recess and a second recess, the first recess cincturing the second recess;
- a template coupled to the chuck body, with a portion of the template adjacent to the first recess defining a first chamber and a portion of the template adjacent to the second recess defining a second chamber;
- and
- a pressure control system coupled to the chuck body to apply a vacuum pressure in the first chamber bowing the first portion of the template towards the chuck body to bow the second portion of the template away from the chuck body.
1 more element
Dependencies are inferred from the claim text.