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US 8,282,089 B2Granted
Vacuum transport device with movable guide rail
AssigneeApplied Materials, Inc.
InventorsOliver Heimel, Andreas Jischke, Dieter Haas
Life of this patent
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Abstract
The present invention concerns a device for transporting substrates through vacuum chambers, especially coating machines with a substrate carrier on or at which the substrates can be arranged, wherein the substrate carrier has at least one guide rail which extends along at least one side of the substrate carrier, and wherein the guide rail is kept spaced apart from the substrate carrier by one or just a few spaced bearings.
Claims22
Device for transporting substrates through vacuum chambers, comprising:
- a substrate carrier, on or at which can be arranged the substrate,
- a guide rail provided at the substrate carrier and extending at least along one side of the substrate carrier, wherein the guide rail is arranged at the substrate carrier such that it is held by one or more bearings spaced apart from the substrate carrier and kept at a distance from the substrate carrier;
- and
- a magnetic holding system guiding the guide rail along a transport path, wherein the magnetic holding system does not contact the guide rail.
1 more element
Dependencies are inferred from the claim text.