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AssigneeAdvanced Technology Materials, Inc.
InventorsW. Karl Olander, James V. McManus, Steven J. Hultquist, Jose I. Arno, Peter C. Van Buskirk
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Fluid storage and dispensing systems, and processes for supplying fluids for use thereof. Various arrangements of fluid storage and dispensing systems are described, involving permutations of the physical sorbent-containing fluid storage and dispensing vessels and internal regulator-equipped fluid storage and dispensing vessels. The systems and processes are applicable to a wide variety of end-use applications, including storage and dispensing of hazardous fluids with enhanced safety. In a specific end-use application, reagent gas is dispensed to a semiconductor manufacturing facility from a large-scale, fixedly positioned fluid storage and dispensing vessel containing physical sorbent holding gas at subatmospheric pressure, with such vessel being refillable from a safe gas source of refill gas, as disclosed herein.
A fluid supply system, comprising:
A fumigation system, comprising a sorbent-based and/or internal regulator-equipped supply vessel holding phosphine and coupled with a dispensing assembly, wherein the supply vessel and dispensing assembly are adapted to contain phosphine in the supply vessel for dispensing phosphine gas at subatmospheric or low superatmospheric pressure from the dispensing assembly, and a mixing assembly coupled in fluid flow communication with the dispensing assembly, wherein said mixing assembly is adapted to mix dispensed phosphine gas from the dispensing assembly with a carrier gas in relative proportions producing a phosphine/carrier gas mixture in which phosphine is diluted to non-flammable concentration in a range of from 2 ppm to 2% in the mixture, and to discharge the phosphine/carrier gas mixture for fumigation use, wherein the carrier gas is selected from the group consisting of air, carbon dioxide, and inert gas.
A fuel supply system, comprising a sorbent-based and/or internal regulator-equipped supply vessel holding a fuel fluid and coupled with a dispensing assembly, wherein the supply vessel and dispensing assembly are adapted to contain the fuel fluid in the supply vessel for dispensing thereof at subatmospheric or low superatmospheric pressure from the dispensing assembly, and a mixing assembly coupled in fluid flow communication with the dispensing assembly, wherein said mixing assembly is adapted to mix dispensed fuel fluid from the dispensing assembly with air in relative proportions producing a fuel fluid/air mixture, and to discharge the fuel fluid/air mixture for use.
A method of supplying a fluid for use, comprising storing said fluid in a sorbent-based and/or internal pressure regulator-equipped supply vessel and dispensing said fluid from the supply vessel through a dispensing assembly, wherein the supply vessel and dispensing assembly are adapted to contain the fluid in the supply vessel for dispensing thereof at subatmospheric or low superatmospheric pressure from the dispensing assembly, and mixing dispensed fluid from the dispensing assembly with a carrier fluid in relative proportions producing a dispensed fluid/carrier fluid mixture in which the dispensed fluid is diluted to a predetermined concentration in the mixture, and discharging the dispensed fluid/carrier fluid mixture for use, wherein the fluid stored in and dispensed from the supply vessel comprises a fluid selected from the group consisting of fumigation fluids, water treatment fluids, and fuel fluids,
Dependencies are inferred from the claim text.