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US 8,281,911 B2Granted
Active vibration isolation system which is more effective against seismic vibration
AssigneeIntegrated Dynamics Engineering GmbH
InventorPeter Heiland
Life of this patent
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Abstract
The invention relates to an active vibration isolation system in which at least one sensor is provided for detection of ground vibration, and the system has a control device which calculates compensation signals in at least two degrees of freedom, based on movements of the ground.
Claims19
An active vibration isolation system, comprising:
- an air bearing for supporting a load to be isolated;
- a first sensor for detecting, in a first degree of freedom, vibration on the ground on which the active vibration isolation system is arranged, wherein the first sensor for detecting the vibration on the ground is a velocity sensor;
- a second sensor for detecting vibration on the load to be isolated;
- a control device for calculating compensation signals in at least two degrees of freedom for the load to be isolated, the compensation signals being based on the vibration detected in the first degree of freedom, wherein the first sensor and the second sensor are signally connected to the control device, and wherein the compensation signals are added by the control device to additional compensation signals that are based on the vibration detected by the second sensor;
- and
- an actuator for acting on the load to be isolated based on the added compensation signals, wherein the control device is signally connected to the actuator.
3 more elements
A method for controlling an active vibration isolation system, the method comprising:
- supporting a load to be isolated by means of an air bearing;
- detecting, by a first sensor, in at least one degree of freedom, vibration of the ground on which the active vibration isolation system is arranged, wherein the first sensor for detecting the vibration on the ground is a velocity sensor;
- detecting, by a second sensor, vibration on the load to be isolated;
- generating compensation signals for controlling actuators in at least two degrees of freedom for the load to be isolated, the compensation signals being based on the vibration detected in the at least one degree of freedom;
- generating additional compensation signals that are based on the vibration detected by the second sensor;
- adding the compensation signals and the additional compensation signals;
- and
- passing the added compensation signals to the actuators.
5 more elements
An active vibration isolation system, comprising:
- an air bearing for supporting a load to be isolated;
- a first sensor for generating a first signal in response to detecting, in a first degree of freedom, vibration on the ground on which the active vibration isolation system is arranged, wherein the first sensor for detecting the vibration on the ground is a velocity sensor;
- a second sensor for generating a second signal in response to detecting vibration on the load to be isolated;
- a memory for storing a calculation rule;
- a control device for calculating, based on the first signal and the calculation rule, compensation signals in at least two degrees of freedom for the load to be isolated, wherein the compensation signals are added by the control device to additional compensation signals that are based on the second signal;
- and
- an actuator for acting on the load to be isolated based on the added compensation signals, wherein the actuator, the first sensor, and the second sensor are signally connected to the control device.
4 more elements
Dependencies are inferred from the claim text.