Wafer inspection system and a method for translating wafers [PD]
AssigneeCamtek Ltd.
InventorsItzik Nisany, Amir Gilead, Michael Vainer, Valery Nuzni
Life of this patent
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Abstract
A method for inspecting a wafer and a system. The system includes: a chuck; and a robot that includes a movable element connected to a detachable adaptor selected from a group of diced wafer detachable adaptors and non-diced wafer detachable adaptors; wherein a diced wafer detachable adaptor is shaped such to partially surround the diced wafer and comprises at least one vacuum groove adapted to apply vacuum on a tape that supports the diced wafer; and wherein the robot is adapted to fetch the wafer from a cassette and to place the wafer on the chuck.
Claims9
A wafer inspection system that comprises:
- an inspection head adapted to inspect a wafer placed at an inspection area;
- and a chuck adapted to place, at the inspection area, a selected frame that supports a tape on which a diced wafer is placed;
- wherein the selected frame is selected out of a group of frames that have different sizes and different sized recesses;
- wherein the chuck comprises multiple sets of immobile register element holders and at least one movable register element;
- wherein each set of immobile register element holders is adapted to hold an immobile register element;
- and
- wherein a spatial relationship between each set of an immobile register element holders and a movable register element of the at least one movable register element is responsive to a size of the selected frame.
A method for inspecting a wafer, the method comprises:
- selecting an immobile register element shaped according to a shape and size of a frame to be supported by a chuck;
- connecting the selected immobile register element to a set of selected immobile register element holder out of multiple sets of immobile register element holders positioned in response to possible shapes and sizes of frames supported by the chuck;
- placing the frame between the selected immobile register element and a movable register element;
- and
- inspecting the wafer to detect defects;
- wherein the wafer is a diced wafer that is placed on a tape that is supported by the frame.
Dependencies are inferred from the claim text.