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US 8,281,658 B2Granted
Method to produce 3-D optical gyroscope my MEMS technology
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTing-Hau Wu, Chun-Ren Cheng, Jiou-Kang Lee, Jung-Huei Peng, Shang-Ying Tsai
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Abstract
A gyroscope sensor includes a gyro disk. A first light source is configured to provide a first light beam adjacent to a first edge of the gyro disk. A first light receiver is configured to receive the first light beam for sensing a vibration at a first direction of the gyro disk.
Claims17
A gyroscope sensor comprising:
- a gyro disk;
- a first light source configured to provide a first light beam adjacent to a first edge of the gyro disk
- a first light receiver configured to receive the first light beam for sensing a vibration at a first direction of the gyro disk;
- a second light source configured to provide a second light beam adjacent to a second edge of the gyro disk, wherein the second light beam is substantially parallel with the first light beam;
- and
- a second light receiver configured to receive the second light beam for sensing a vibration at a second direction of the gyro disk, wherein the second direction is substantially perpendicular to the first direction.
3 more elements
A system comprising:
- a gyroscope sensor comprising:
- a gyro disk;
- a first light source configured to provide a first light beam adjacent to a first edge of the gyro disk;
- and
- a first light receiver configured to receive the first light beam for sensing a vibration at a first direction of the gyro disk;
- a second light source configured to provide a second light beam adjacent to a second edge of the gyro disk, wherein the second light beam is substantially parallel with the first light beam;
- and
- a second light receiver configured to receive the second light beam for sensing a vibration at a second direction of the gyro disk, wherein the second direction is substantially perpendicular to the first direction;
- and
- a processing unit coupled with the gyroscope sensor, the processing unit being capable of controlling the system corresponding to the vibration at the first direction of the gyro disk.
7 more elements
A method for forming a structure for a gyroscope sensor, the method comprising:
- forming a gyro disk spaced from a frame by at least one first light channel, wherein the first light channel is capable of providing a path for a first light beam that is capable of being sensed for determining a vibration at a first direction of the gyro disk;
- and
- forming at least one second light channel within the frame, wherein the at least one second light channel is capable of providing a path for a second light beam which is capable of being sensed for determining a vibration at a second direction of the gyro disk, wherein the second direction is substantially perpendicular to the first direction.
Dependencies are inferred from the claim text.