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US 8,281,642 B2Granted
Environmental gas sensor and method of manufacturing the same
AssigneeElectronics and Telecommunications Research Institute
InventorsSu Jae Lee, Jin Ah Park, Jae Hyun Moon, Seong Hyun Kim, Tae Hyoung Zyung, Hye Yong Chu
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Abstract
Provided are an environmental gas sensor and a method of manufacturing the same. The environmental gas sensor includes an insulating substrate, metal electrodes formed on the insulating substrate, and a sensing layer in which different kinds of nanofibers are arranged perpendicular to each other on the metal electrodes. Thus, the environmental gas sensor can simultaneously sense two kinds of gases.
Claims15
An environmental gas sensor, comprising:
- an insulating substrate;
- metal electrodes formed on the insulating substrate;
- and
- a sensing layer in which different kinds of nanofibers are arranged perpendicular to and overlapping each other on the metal electrodes.
1 more element
A method of manufacturing an environmental gas sensor, comprising:
- forming metal electrodes on an insulating substrate;
- arranging different kinds of nanofibers perpendicular to and overlapping each other on the metal electrodes through electrospinning;
- and
- forming a sensing layer by heat-treating the different kinds of nanofibers arranged.
1 more element
Dependencies are inferred from the claim text.