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US 8,281,482 B2Granted
Method of fabricating crack-resistant thermal bend actuator
AssigneeZamtec Ltd
InventorsGregory John McAvoy, Vincent Patrick Lawlor, Rónán Pádraig Seán O'Reilly
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Abstract
A method of fabricating a thermal bend actuator comprises the steps of: (a) depositing a first layer comprised of silicon nitride onto a sacrificial scaffold; (b) depositing a second layer comprised of silicon dioxide onto the first layer; (c) depositing an active beam layer onto the second layer; (d) etching the active beam layer, the first layer and the second layer to define the thermal bend actuator; and (e) releasing the thermal bend actuator by removing the sacrificial scaffold.
Claims20
A method of fabricating a thermal bend actuator comprising the steps of:
- (a) depositing a first layer comprised of silicon nitride onto a sacrificial scaffold;
- (b) depositing a second layer comprised of silicon dioxide onto the first layer;
- (c) depositing an active beam layer onto said second layer;
- (d) etching said active beam layer, said first layer and said second layer to define the thermal bend actuator, said thermal bend actuator comprising an active beam and a passive beam, said passive beam comprising said first and second layers;
- and
- (e) releasing said thermal bend actuator by removing said sacrificial scaffold.
3 more elements
Dependencies are inferred from the claim text.