Move mechanism for moving target object and charged particle beam writing apparatus
AssigneeNuFlare Technology, Inc.
InventorsShuichi Tamamushi, Shuichiro Fukutome
Life of this patent
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Abstract
A move mechanism for horizontally moving a target object in an accelerating manner, includes a moving unit configured to be horizontally moved in an accelerating manner, a plate part arranged on the moving unit and supported by the moving unit at a substantially center-of-gravity height position, and a mirror part configured to reflect a laser beam for measuring a position, the mirror part being connected to the plate part such that a center-of-gravity height position of the mirror part is arranged at the substantially center-of-gravity height position of the plate part.
Claims11
A charged particle beam writing apparatus comprising:
- a stage configured to carry a target object and further configured to be horizontally moved in an accelerating manner while a pattern is written on the target object;
- an irradiation unit configured to irradiate a charged particle beam to the target object for writing the pattern;
- an acceleration measurement unit configured to measure an acceleration associated with a movement of the stage while writing the pattern;
- a deflector configured to deflect the charged particle beam to a position corrected based on the acceleration associated with the movement of the stage while writing the pattern;
- and
- a deflection computation unit configured to perform a computation of an amount of the deflection of the charged particle beam, wherein the computation of an amount of the deflection includes a computation of a deformation associated with the stage.
Dependencies are inferred from the claim text.