Magnetic pad for end-effectors
AssigneeApplied Materials, Inc.
InventorKyung-Tae Kim
Life of this patent
Estimating the term…
Abstract
Embodiments of the invention relate to apparatus and method for supporting and transferring large area substrate in a vacuum condition. One embodiment of the invention provides an apparatus comprising one or more end effectors having a plurality of end effector pads disposed thereon without mechanically joining to the one or more end effectors. In one embodiment, a plurality of end effector pad assemblies are coupled to one or more end effectors by magnetic force.
Claims13
A pad assembly for an end effector, the pad assembly comprising:
- a base member adapted to secure the pad assembly to the end effector, the base member comprising a ferromagnetic material that is configured to be attached to the end effector by magnetic force, wherein the base member has a first side for contacting the end effector and a second side opposing the first side;
- a pad member coupled to the base member, wherein the pad member has a first side in contact with the second side of the base member and a second side opposing the first side of the pad member, and at least a portion of the second side of the pad member is raised to form a contacting area for receiving and supporting a substrate;
- and
- a fastening means to join the base member and the pad member, wherein the base member has two columns extending from the first side, and the two columns are configured to fit in recesses formed in the end effector.
A pad assembly for an end effector of a vacuum robot, the pad assembly comprising:
- a pad member configured to provide a contact area for supporting a substrate using the vacuum robot, wherein the pad member has a first side and a second side opposing the first side, wherein the first side is substantially planar, the second side has a contact structure extending therefrom and a top surface of the contact structure forms the contact area;
- a base member adapted to secure the pad assembly to the end effector, wherein the base member is in contact with the first side of the pad member;
- a clamp member contacting the second side of the pad member, wherein the clamp member has a hole allowing the contact structure to be exposed;
- and
- a fastening means to join the base member, the pad member and the clamp member, wherein the contact structure is a cone structure, and an open end of the cone structure forms the contact area.
A pad assembly for an end effector, the pad assembly comprising:
- a base member having a first side for contacting the end effector and a second side opposing the first side;
- a pad member having a first side in contact with the second side of the base member and a second side opposing the first side of the pad member;
- a clamp member to fix the base member to the pad member;
- and
- a raised structure providing a contact area for supporting a substrate, wherein the base member has two columns extending from the first side.
Dependencies are inferred from the claim text.