Tomographic atom probe comprising an electro-optical generator of high-voltage electrical pulses
AssigneesCameca, Cnrs
InventorsFrançois Vurpillot, Alain Bostel
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AssigneesCameca, Cnrs
InventorsFrançois Vurpillot, Alain Bostel
Estimating the term…
A tomographic atom probe uses electrical pulses applied to an electrode in order to carry out evaporation of the sample being analyzed. In order to produce these electrical pulses, the tomographic atom probe comprises a high-voltage generator connected to an electrode by an electrical connection comprising a chip of semiconductor material. The probe also comprises a light source which can be controlled in order to generate light pulses which are applied to the semiconductor chip. Throughout the illumination, the chip is rendered conductive, which puts the high-voltage generator and the electrode in electrical contact so that a potential step is applied to the latter. The probe also comprises means for applying a voltage step of opposite amplitude to the previous step at the end of a time interval Δt0, so that the electrode finally receives a voltage pulse of duration Δt0.
A tomographic atom probe having means for applying an electrical evaporation pulse of amplitude Vp and duration Δt0 to an end of a sample which is placed at a potential V0, said tomographic atom probe comprising:
Dependencies are inferred from the claim text.