US 8,275,270 B2 · High-sensitivity, high-resolution detector devices and arrays

Abstract

Avalanche amplification structures including electrodes, an avalanche region, a quantifier, an integrator, a governor, and a substrate arranged to detect a weak signal composed of as few as several electrons are presented. Quantifier regulates the avalanche process. Integrator accumulates a signal charge. Governor drains the integrator and controls the quantifier. Avalanche amplifying structures include: normal quantifier, reverse bias designs; normal quantifier, normal bias designs; lateral quantifier, normal bias designs; changeable quantifier, normal bias, adjusting electrode designs; normal quantifier, normal bias, adjusting electrode designs; and lateral quantifier, normal bias, annular integrator designs. Avalanche amplification structures are likewise arranged to provide arrays of multi-channel devices. The described invention is expected to be used within photodetectors, electron amplifiers, chemical and biological sensors, and chemical and biological chips with lab-on-a-chip applications. Structures have immediately applicability to devices critical to homeland defense.

Claims24

Dependent claims

An avalanche amplifying structure operating in the Geiger mode comprising:

(a) a heavily doped substrate;
(b) a laminated semiconductor structure including:
(i) an avalanche region with conductance opposite said substrate;
(ii) an integrator layer which accumulates a signal charge comprised of a heavily doped material with conductance same as said substrate, said integrator layer contacting said avalanche region along an interface which functions as a quantifier to regulate the avalanche process;
and
(iii) a governor layer which drains said integrator and controls said quantifier, said governor layer contacting said integrator layer opposite said avalanche region, said governor layer contacting said substrate;
(c) a first electrode communicating with said avalanche region opposite said integrator;
and
(d) a second electrode communicating with said substrate opposite said governor layer.

6 more elements

Dependencies are inferred from the claim text.

High-sensitivity, high-resolution detector devices and arrays

Life of this patent

High-sensitivity, high-resolution detector devices and arrays

Life of this patent

Abstract

Claims24