Counter-balanced MEMS mirror with hidden hinge
OwnerAbdul Jaleel K. Moiduinventor
Life of this patent
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Abstract
A multi-layer hidden hinge and actuator design for high fill factor biaxial MEMS mirror array for wavelength selective switches (WSS) based on a silicon-on-insulator (SOI) process with wafer bonding and coarsely aligned orthogonal vertical comb and/or parallel plate actuator. The present invention relates to a micro-mirror in a MEMS linear piano micro-mirror array comprising a micro-mirror layer, a hinge layer and an electrode/substrate layer. The structure is formed by fabricating the layers separately in SOI structure and then bonding them together.
Claims10
A micro-electro-mechanical (MEMs) device comprising:
- a substrate with first and second supports extending upwardly therefrom;
- a tilting element pivotable about a first axis;
- first hinges, defining the first axis, extending from opposite sides of the tilting element connected to the first and second supports;
- a first ground electrode connected to the tilting element;
- a pedestal extending upwardly from the tilting element;
- a reflective body mounted on the pedestal;
- a counter mass extending downwardly from the tilting element to counter balance the weight of the reflective body about the first axis;
- and
- a first hot electrode mounted on the substrate for attracting the first ground electrode, thereby rotating the tilting element and the reflective body about the first axis.
A micro-electro-mechanical (MEMs) device comprising:
- a substrate with first and second supports extending upwardly therefrom;
- a tilting element pivotable about a first axis above the substrate in a first layer having a first thickness;
- first hinges, defining the first axis, extending from opposite sides of the tilting element in the first layer connected to the first and second supports;
- a rolling element, in the first layer surrounding the tilting element and receiving the ends of the first hinges, pivotable about a second axis perpendicular to the first axis;
- second hinges, in the first layer defining the second axis, extending from the rolling element, the outer ends of which are fixed to one of the first and second supports;
- a pedestal extending upwardly from the tilting element;
- a reflective body mounted on the pedestal;
- a first ground electrode in a second layer connected to an underside of the tilting element;
- a first hot electrode mounted on the substrate for attracting the first ground electrode, thereby rotating the tilting element and the reflective body about the first axis;
- a second ground electrode in the second layer connected to an underside of the rolling element;
- and
- a second hot electrode mounted on the substrate, for attracting the first ground electrode, thereby rotating the rolling element, the tilting element and the reflective body about the second axis;
- wherein the first and second ground electrodes in the second layer counter balance the weight of the reflective body about the first axis.
Dependencies are inferred from the claim text.