Defect inspection system and method of the same

A defect inspection method for inspecting a defect on an inspection subject on a substrate, comprising:

• generating periodic pulsed illuminating light from a light source, under a plurality of optical conditions, including different polarization states and illumination orientations;
• illuminating the periodic pulsed illuminating light onto a predetermined areas of an inspection subject substrate, thereby generating scattered light;
• obtaining images that differ temporally, and some of which differ in polarization state and/or illumination orientation, of the predetermined area of the inspection object, by guiding onto a detector the scattered light resulting from illuminating the periodic pulsed illuminating light onto the inspection subject substrate;
• extracting, from the images of the predetermined area, values of features of the predetermined area;
• and
• determining a defect in the predetermined area of the inspection object, based on statistical analysis of one or more correlations between values of features, wherein a value that deviates from a predetermined criterion is determined to be a defect.

A defect inspection method, comprising:

• emitting periodic pulsed illuminating light from a light source, the periodic pulsed illuminating light being in the form of a beam having a plurality of different wavelengths;
• redirecting an optical path of the beam, by using mirrors;
• illuminating the periodic pulsed illuminating light onto a predetermined area of an inspection subject substrate, thereby generating scattered light components;
• detecting images that differ temporally, and some of which differ in wavelength, by guiding to a detector scattered light components propagating in a predetermined range of an azimuthal angle and in a predetermined range of an elevation angle;
• extracting values of features from the detected images of the predetermined area;
• and
• determining a defect in the predetermined area of the inspection object, based on statistical analysis of one or more correlations between values of features, wherein a value that deviates from a predetermined criterion is determined to be a defect.