Semiconductor device with interface peeling preventing rewiring layer
AssigneeOki Semiconductor Co., Ltd.
InventorKiyonori Watanabe
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AssigneeOki Semiconductor Co., Ltd.
InventorKiyonori Watanabe
Estimating the term…
A semiconductor device which is capable of preventing interface peeling and a crack from occurring in the vicinity of the edge part of a rewiring layer is provided. The semiconductor device includes a semiconductor substrate, an electrode pad formed on the semiconductor substrate, a first insulation film formed on the semiconductor substrate having a first aperture which exposes the electrode pad, a first conductor film formed on the electrode pad and the first insulation film, an external electrode electrically connected to the first conductor film, and a sealing resin which covers the first conductor film and the first insulation film. The first conductor film includes a plurality of copper layers which are stacked so that an outer edge portion of the first conductor film has a stepped portion.
A semiconductor device, comprising:
Dependencies are inferred from the claim text.